An electro-thermal silicon-polymer micro-gripper for simultaneous in- plane and out-of-plane motions
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چکیده
An electro-thermal micro-gripper for both in-plane clamping and out-of-plane motion is presented. The device consists of both in-plane and out-of-plane actuators. Each gripper arm performs a 7.4 μm in-plane and a 14 μm out-of-plane motion at 1.6 V and 2.5V actuation voltage, respectively. The maximum temperature and power consumption are 180 °C and 26.5 mW and 80 °C and 87.3mW for the in-plane and out-of-plane actuator, respectively. An IC-compatible process is developed to integrate the two types of motions in one device.
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تاریخ انتشار 2008